Marco Haverlag
Ph.D. Technische Universiteit Eindhoven 1991
![Netherlands Netherlands](img/flags/Netherlands.gif)
Dissertation:
Plasma chemistry of fluorocarbon RF discharges used for dry etching
Advisor 1: Frits (Frederik Johan) de Hoog
Advisor 2: Gerardus Maria Wilhelmus Kroesen
No students known.
If you have additional information or corrections regarding this mathematician, please use the update form. To submit students of this mathematician, please use the new data form, noting this mathematician's MGP ID of 317575 for the advisor ID.