Edwin Johannes Cornelis Bos
Ph.D. Technische Universiteit Eindhoven 2008
Dissertation:
Tactile 3D probing system for measuring MEMS with nanometer uncertainty: Aspects of probing, design, manufacturing and assembly
Advisor 1: Piet H. J. Schellekens
Advisor 2: Franciscus Leonardus Marie Delbressine
No students known.
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