Luca Cisotto
Ph.D. Technische Universiteit Delft 2018
Dissertation:
Optimisation of Coherent Fourier Scatterometry for Side Wall Angle Estimation of Printed Structures
Advisor 1: H. Paul (Hendrik) Urbach
No students known.
If you have additional information or corrections regarding this mathematician, please use the update form. To submit students of this mathematician, please use the new data form, noting this mathematician's MGP ID of 307195 for the advisor ID.